Résumé
The development of advanced piezoelectric quartz MEMS for sensing and precise
frequency control applications requires the nanostructuration and on chip
integration on silicon of this material. However, the current quartz
manufacturing methods are based on bonding bulk micromachined crystals on
silicon, which limits the size, the performance, the integration cost and the
scalability of quartz micro devices. Here, we combine chemical solution
deposition, soft nanoimprint lithography and top down microfabrication
processes to develop the first nanostructured epitaxial 100 quartz 100 Si
piezoelectric cantilevers. The coherent Si quartz interface and film thinness
combined with a controlled nanostructuration on silicon insulator silicon
technology substrates provides high force and mass sensitivity while preserving
the mechanical quality factor of the microelectromechanical systems. This work
proves that biocompatible nanostructured epitaxial piezoelectric quartz based
MEMS on silicon can be engineered at low cost by combining soft chemistry and
top down lithographic techniques.