Résumé
The authors studied the degradation of metal-oxide semiconductor field effect transistors with 5 nm oxide thickness under Fowler-Nordheim ͑FN͒ stress. In order to study the generated damage in the oxide, they have analyzed the dc characteristics and low frequency noise. The FN stress induces no significant increase in 1/f noise. At the same time random telegraph signal ͑RTS͒ noise is also observed, and its amplitude associated with the drain current is investigated. The failure of the RTS amplitude model assumes that this noise is related to a conductive path.