Abstract
The impact of surface chemistry on the morphogenesis of maleic anhydride plasma polymer is investigated onto silicon wafers with very well-controlled surface chemistries (i.e. native oxide, hydroxyl-rich and alkyl-rich). A particular attention is paid to characterize the early stages of growth. Two different morphologies of polymer films are obtained depending on the hydrophilic or hydrophobic nature of the substrate surface even though the chemical composition is very similar. Homogeneous and dense polymer films are formed on hydrophilic substrates due to the strong affinity of plasma species for the surface. Elongated nanostructures resulting in a less dense polymer film grows on the hydrophobic surface, which are assumed to be the result of the low affinity of plasma species.