Résumé
Micro and nanoelectromechanical systems (MEMS/NEMS), especially piezoelectric resonators, offer a promising strategy for the manufacturing of point‐of‐care devices providing rapid, sensitive, and field‐deployable tests with minimal user training for the diagnostics of viral infections. High‐frequency (HF) MEMS/NEMS have the potential for ultrasensitive mass‐loading devices. Yet, their use for biomedical applications requires challenging manufacturing qualities. Here, a large‐scale chemical integration of epitaxial α‐quartz (100) thin films is developed on silicon wafers up to 4‐inches. This methodology allows the microfabrication of wafer‐scale piezoelectric α‐quartz/silicon bioMEMS using a recognition layer capable of selectively detecting Chikungunya virus. Using contact‐free vibrometry, a mass sensitivity of the bioMEMS device of 22.4 pg Hz −1 is showen in liquid conditions and a Chikungunya virus limit of detection of 9 ng ml −1 . To reach piezoelectric transduction for compact quartz sensor devices, NEMS resonators are developed at super HF, i.e., 17.8 GHz with a quality factor of 280, which represents a QxF product of 4.98·10 12 . These α‐quartz NEMS can reach thicknesses between 100 and 800 nm and lateral dimensions up to 9 mm 2 . This work opens the door for cost‐efficient single‐chip epitaxial piezoelectric α‐quartz/Si ultrasensitive NEMS sensors manufactured exclusively by soft‐chemistry for biomedical applications and many other fields.