- Title
- "Ultra low-k PECVD porogen approach : Matrix precursors comparison and porogen removal treatment study"
- Creators - without role
- L. Favennec - STMicroelectronicsV. Jousseaume - Commissariat à l'Énergie Atomique et aux Énergies AlternativesV. Rouessac - Université de Montpellier, Institut Européen des Membranes - IEMJ. Durand - Université de Montpellier, Institut Européen des Membranes - IEMG. Passemard - STMicroelectronics
- Publication Details
- MRS Online Proceedings Library, Vol.863
- Identifiers
- 9945736009311
- Academic Unit
- Institut Européen des Membranes - IEM
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-00077998
Journal article
"Ultra low-k PECVD porogen approach : Matrix precursors comparison and porogen removal treatment study"
MRS Online Proceedings Library, Vol.863
2005
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