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UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer
Journal article   Open access   Peer reviewed

UV/ozone surface treatment increases hydrophilicity and enhances functionality of SU-8 photoresist polymer

Aleksandra Delplanque, Etienne Henry, Joseph Lautru, Hervé Leh, Malcolm Buckle and Claude Nogues
Applied Surface Science, Vol.314, pp.280 - 285
2014

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