Abstract
To power the next generation of miniaturized electronic devices, the energy storage capability of Li-ion micro-batteries must be significantly improved and the fabrication of high-performance 3D electrodes is mandatory. Here we show how to carefully match the design of efficient 3D scaffold based on metallic porous template with the deposition parameters of titanium dioxide films fabricated using the thermal atomic layer deposition method for designing efficient 3D Li-ion micro-batteries. A 3D electrode made from Pt porous scaffold coated with 150 nm-thick anatase TiO2 film reaches a remarkable surface capacity value up to 1600 µAh.cm-2 at C/12 with a good cycling stability during 100 cycles.