Thermoelectric microsensor for pressure and gas concentration measurement

Journal article

Peer reviewed

Alain Giani, A. Al Bayaz, A. Boulouz, F. Pascal-Delannoy, A. Foucaran and Alexandre Boyer

Materials Science and Engineering: B, Vol.B95, pp.268-274

2002

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Title: Thermoelectric microsensor for pressure and gas concentration measurement
Creators - without role: Alain Giani - Université de Montpellier
A. Al Bayaz - Université de Montpellier
A. Boulouz - Centre National de la Recherche Scientifique
F. Pascal-Delannoy - Université de Montpellier
A. Foucaran - Université de Montpellier
Alexandre Boyer - Centre d'Electronique et de Micro-optoélectronique de Montpellier
Publication Details: Materials Science and Engineering: B, Vol.B95, pp.268-274
Identifiers: 9947206409311
Academic Unit: Université de Montpellier
Language: English
Resource Type: Journal article
Local Fields: hal-00323831