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Surface investigation of plasma HMDSO membranes post-treated by CF4/Ar plasma
Journal article   Peer reviewed

Surface investigation of plasma HMDSO membranes post-treated by CF4/Ar plasma

E. Finot, Stephanie Roualdes, M. Kirchner, V. Rouessac, R. Berjoan, Jean Durand, Jp Goudonnet and Louis Cot
Applied Surface Science, Vol.187, pp.326-338
2002

Abstract

TRANSPORT surface treatments membrane PECVD AFM XPS contact angle FORCE MICROSCOPY SKIN LAYER GAS
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