Sub-10 nm Features Obtained from Directed Self-Assembly of Semicrystalline Polycarbosilane-Based Block Copolymer Thin Films

Karim Aissou; Muhammad Mumtaz; Guillaume Fleury; Giuseppe Portale; Christophe Navarro; Eric Cloutet; Cyril Brochon; Caroline A. Ross; Georges Hadziioannou

doi:10.1002/adma.201404077

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Sub-10 nm Features Obtained from Directed Self-Assembly of Semicrystalline Polycarbosilane-Based Block Copolymer Thin Films

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Sub-10 nm Features Obtained from Directed Self-Assembly of Semicrystalline Polycarbosilane-Based Block Copolymer Thin Films

Karim Aissou, Muhammad Mumtaz, Guillaume Fleury, Giuseppe Portale, Christophe Navarro, Eric Cloutet, Cyril Brochon, Caroline A. Ross et Georges Hadziioannou

Advanced materials (Weinheim), Vol.27(2), pp.261-265

14/01/2015

DOI: https://doi.org/10.1002/adma.201404077

PMID: 25382210

Résumé

Chemistry

Chemistry, Multidisciplinary

Chemistry, Physical

Materials Science

Materials Science, Multidisciplinary

Nanoscience & Nanotechnology

Physical Sciences

Physics

Physics, Applied

Physics, Condensed Matter

Science & Technology

Science & Technology - Other Topics

Technology

Highly-ordered arrays with sub-10 nm features are produced with topographical-directed self-assembly of low-molecular-weight poly(1,1-dimethyl silacyclobutane)block-poly(methyl methacrylate). This system turns out to be of high interest for lithographic applications since the domain orientation is solely controlled through the polymer layer thickness, while the promotion of the microphase separation is obtained by a short thermal annealing process under mild conditions. [GRAPHICS] .

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Titre: Sub-10 nm Features Obtained from Directed Self-Assembly of Semicrystalline Polycarbosilane-Based Block Copolymer Thin Films
Créateurs - sans rôle: Karim Aissou - Univ Bordeaux, Lab Chim Polymeres Organ, CNRS, ENSCPB,UMR 5629, F-33607 Pessac, France
Muhammad Mumtaz - Univ Bordeaux, Lab Chim Polymeres Organ, CNRS, ENSCPB,UMR 5629, F-33607 Pessac, France
Guillaume Fleury - Univ Bordeaux, Lab Chim Polymeres Organ, CNRS, ENSCPB,UMR 5629, F-33607 Pessac, France
Giuseppe Portale - ESRF, Netherlands Org Sci Res NWO, DUBBLE CRG, Grenoble, France
Christophe Navarro - Grp Rech Lacq, ARKEMA, F-64170 Lacq, France
Eric Cloutet - Univ Bordeaux, Lab Chim Polymeres Organ, CNRS, ENSCPB,UMR 5629, F-33607 Pessac, France
Cyril Brochon - Univ Bordeaux, Lab Chim Polymeres Organ, CNRS, ENSCPB,UMR 5629, F-33607 Pessac, France
Caroline A. Ross - MIT, Dept Mat Sci & Engn, Cambridge, MA 02139 USA
Georges Hadziioannou - Univ Bordeaux, Lab Chim Polymeres Organ, CNRS, ENSCPB,UMR 5629, F-33607 Pessac, France
Détails de publication: Advanced materials (Weinheim), Vol.27(2), pp.261-265
Éditeur: Wiley
Nombre de pages: 5
Note de subvention: Arkema TSMC Region Aquitaine; Region Nouvelle-Aquitaine Semiconductor Research Corporation
Identifiants: 99149207309311
Unité académique: Institut Européen des Membranes - IEM
Langue: English
Type de ressource: Journal article