- Title
- Study of the growth mechanism of CVD silicon films on silica by X-ray reflectivity, atomic force microscopy and scanning electron microscopy
- Creators - without role
- A. van Der Lee - Université de Montpellier, Institut Européen des Membranes - IEMJ. Durand - Université de Montpellier, Institut Européen des Membranes - IEMD. Cot - Université de Montpellier, Institut Européen des Membranes - IEML. Vazquez - Consejo Superior de Investigaciones Científicas
- Publication Details
- Journal de Physique IV Proceedings, Vol.09(PR8), pp.Pr8-157 - Pr8-164
- Identifiers
- 9935197009311
- Academic Unit
- Institut Européen des Membranes - IEM
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-01737524
Journal article
Study of the growth mechanism of CVD silicon films on silica by X-ray reflectivity, atomic force microscopy and scanning electron microscopy
Journal de Physique IV Proceedings, Vol.09(PR8), pp.Pr8-157 - Pr8-164
09/1999
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