Structure of amorphous hydrogenated carbon films prepared by radio frequency plasma enhanced chemical vapor deposition. An analogy with the structure zone model developed for metals

Journal article

Peer reviewed

B. Dumay, E. Finot, M. Theobald, O. Legaie, J. Durand, P. Baclet and J. Goudonnet

Journal of Applied Physics, Vol.92(11), pp.6572 - 6581

12/2002

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Title: Structure of amorphous hydrogenated carbon films prepared by radio frequency plasma enhanced chemical vapor deposition. An analogy with the structure zone model developed for metals
Creators - without role: B. Dumay - CEA Valduc
E. Finot - Centre National de la Recherche Scientifique
M. Theobald - CEA Valduc
O. Legaie - CEA Valduc
J. Durand - Université de Montpellier, Institut Européen des Membranes - IEM
P. Baclet - CEA Valduc
J. Goudonnet - Université de Bourgogne
Publication Details: Journal of Applied Physics, Vol.92(11), pp.6572 - 6581
Identifiers: 9936375709311
Academic Unit: Institut Européen des Membranes - IEM
Language: English
Resource Type: Journal article
Local Fields: hal-01726650