- Title
- Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
- Creators - without role
- Esko Ahvenniemi - Aalto UniversityAndrew R. Akbashev - Stanford UniversitySaima Ali - Aalto UniversityMikhael Bechelany - Université de Montpellier, Institut Européen des Membranes - IEMMaria Berdova - University of TwenteStefan Boyadjiev - Bulgarian Academy of SciencesDavid C. Cameron - Masaryk UniversityRong Chen - Huazhong University of Science and TechnologyMikhail Chubarov - Université Grenoble AlpesVeronique Cremers - Ghent UniversityAnjana Devi - Ruhr University BochumViktor Drozd - St Petersburg UniversityLiliya Elnikova - Institute for Theoretical and Experimental PhysicsGloria Gottardi - Fondazione Bruno KesslerKestutis Grigoras - TietoDennis M. Hausmann - Lam ResearchCheol Seong Hwang - Seoul National UniversityShih-Hui Jen - GlobalFoundriesTanja Kallio - Aalto UniversityJaana Kanervo - Åbo Akademi UniversityIvan Khmelnitskiy - Saint Petersburg State Electrotechnical UniversityDo Han Kim - Massachusetts Institute of TechnologyLev KlibanovYury Koshtyal - Ioffe InstituteA. Outi I. Krause - Aalto UniversityJakob Kuhs - Ghent UniversityIrina Kärkkänen - SENTECH InstrumentsMarja-Leena KääriäinenTommi Kääriäinen - University of HelsinkiLuca Lamagna - STMicroelectronicsAdam A. Łapicki - SeagateMarkku Leskelä - University of HelsinkiHarri Lipsanen - Aalto UniversityJussi Lyytinen - Aalto UniversityAnatoly MalkovAnatoly MalyginAbdelkader Mennad - Centre de Développement des Technologies AvancéesChristian Militzer - Chemnitz University of TechnologyJyrki MolariusMałgorzata Norek - Military University of Technology in WarsawÇağla Özgit-Akgün - Aselsan (Turkey)Mikhail Panov - Saint Petersburg State Electrotechnical UniversityHenrik Pedersen - Linköping UniversityFabien Piallat - Commissariat à l'Énergie Atomique et aux Énergies AlternativesGeorgi Popov - University of HelsinkiRiikka L. Puurunen - VTT Technical Research Centre of FinlandGeert Rampelberg - Ghent UniversityRobin H. A. Ras - Aalto UniversityErwan Rauwel - Tallinn University of TechnologyFred Roozeboom - Eindhoven University of TechnologyTimo Sajavaara - University of JyväskyläHossein Salami - University of Maryland, College ParkHele Savin - Aalto UniversityNathanaelle Schneider - Centre National de la Recherche ScientifiqueThomas E. SeidelJonas Sundqvist - Fraunhofer Institute for Ceramic Technologies and SystemsDmitry B. Suyatin - Lund UniversityTobias Törndahl - Uppsala UniversityJ. Ruud van Ommen - Delft University of TechnologyClaudia Wiemer - Istituto per la Microelettronica e Microsistemi [Catania]Oili M. E. YlivaaraOksana Yurkevich - Immanuel Kant Baltic Federal University
- Publication Details
- Journal of Vacuum Science & Technology A, Vol.35(1)
- Identifiers
- 9937042409311
- Academic Unit
- Institut Européen des Membranes - IEM
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-01675126
Journal article
Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”
Journal of Vacuum Science & Technology A, Vol.35(1)
01/2017
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