Realization of porous silicon membranes for gas sensor applications

Journal article

Peer reviewed

T. Taliercio, M. Dilhan, E. Massone, A. Gué, B. Fraisse and A. Foucaran

Thin Solid Films, Vol.255(1-2), pp.310 - 312

01/1995

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Title: Realization of porous silicon membranes for gas sensor applications
Creators - without role: T. Taliercio - Centre National de la Recherche Scientifique
M. Dilhan
E. Massone - Centre National de la Recherche Scientifique
A. Gué - Roche
B. Fraisse - Université de Montpellier
A. Foucaran - Centre National de la Recherche Scientifique
Publication Details: Thin Solid Films, Vol.255(1-2), pp.310 - 312
Identifiers: 9946282109311
Academic Unit: Université de Montpellier
Language: English
Resource Type: Journal article
Local Fields: hal-01788490