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Raman and micro-Raman spectroscopy of GaN layers deposited on sapphire
Article de revue   Avec comité de lecture

Raman and micro-Raman spectroscopy of GaN layers deposited on sapphire

J Camassel, B Beaumont, T Taliercio, J P Malzac, R Schwedler, P Gibart et P Perlin
SILICON CARBIDE AND RELATED MATERIALS 1995, Vol.142, pp.959-962
INSTITUTE OF PHYSICS CONFERENCE SERIES
01/01/1996

Résumé

Engineering Engineering, Electrical & Electronic Materials Science Materials Science, Multidisciplinary Physical Sciences Physics Physics, Condensed Matter Physics, Multidisciplinary Science & Technology Technology
We report on the structural properties of GaN layers deposited by atmospheric pressure MOVPE on sapphire substrates. Using both Raman and spatially resolved micro-Raman spectroscopy, we show that they have almost no strain and a negligeable concentration of residual free carriers. In some samples, we evidence also a high level of interfacial disorder which varies from run to run. This comes from the experimental difficulty to fully master the GaN buffer layer morphology.

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