- Title
- Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data
- Creators - without role
- Matthieu J. Lépinay - Université de Montpellier, Institut Européen des Membranes - IEMLucile Broussous - STMicroelectronicsChristophe Licitra - Institut polytechnique de GrenobleFrançois Bertin - Université Grenoble AlpesV. Rouessac - Université de Montpellier, Institut Européen des Membranes - IEMAndre Ayral - Université de Montpellier, Institut Européen des Membranes - IEMBenoit Coasne - Université de Montpellier, Institut Charles Gerhardt Montpellier - ICGM
- Publication Details
- Microporous and Mesoporous Materials, Vol.217, pp.119 - 124
- Identifiers
- 9942492809311
- Academic Unit
- Institut Charles Gerhardt Montpellier - ICGM; Institut Européen des Membranes - IEM
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-01684622
Journal article
Probing the microporosity of low-k organosilica films: MP and t-plot methods applied to ellipsometric porosimetry data
Microporous and Mesoporous Materials, Vol.217, pp.119 - 124
11/2015
Metrics
1 Record Views