- Title
- Preparation electrical properties and interface studies of plasma nitride layers on n ‐type InP
- Creators - without role
- A. Astito - Centre National de la Recherche ScientifiqueA. Foucaran - Centre National de la Recherche ScientifiqueG. Bastide - Centre National de la Recherche ScientifiqueM. Rouzeyre - Centre National de la Recherche ScientifiqueJ. Leclercq - Centre National de la Recherche ScientifiqueJ. Durand - Université de Montpellier, Institut Européen des Membranes - IEM
- Publication Details
- Journal of Applied Physics, Vol.70(5), pp.2584 - 2588
- Identifiers
- 9946281709311
- Academic Unit
- Institut Européen des Membranes - IEM
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-01788466
Journal article
Preparation electrical properties and interface studies of plasma nitride layers on n ‐type InP
Journal of Applied Physics, Vol.70(5), pp.2584 - 2588
09/1991
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