Prediction of dynamic behaviour of Pt/SiNx suspended beams for their use in harsh environment

Journal article

Open access

Peer reviewed

Journal of Physics: Conference Series, Vol.922

23/11/2017

Files and links (2)

url

Find in HALView

url

https://doi.org/10.1088/1742-6596/922/1/012013View

Published (Version of record) Open

1 Record Views

Title: Prediction of dynamic behaviour of Pt/SiNx suspended beams for their use in harsh environment
Creators - without role: Baudry Florian
Alain Giani - Université de Montpellier, Institut d'Electronique et des Systèmes - IES
Philippe Combette - Université de Montpellier, Institut d'Electronique et des Systèmes - IES
Publication Details: Journal of Physics: Conference Series, Vol.922
Identifiers: 9944916309311
Academic Unit: Institut d'Electronique et des Systèmes - IES
Language: English
Resource Type: Journal article
Local Fields: hal-02052570