"Precursor chemistry for ULK CVD"

Journal article

Peer reviewed

V. Rouessac, L. Favennec, B. Remiat, V. Jousseaume, G. Passemard and J. Durand

Microelectronic Engineering, Vol.82, pp.333-340

2005

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Title: "Precursor chemistry for ULK CVD"
Creators - without role: V. Rouessac - Université de Montpellier, Institut Européen des Membranes - IEM
L. Favennec - STMicroelectronics
B. Remiat - CEA Grenoble
V. Jousseaume - Commissariat à l'Énergie Atomique et aux Énergies Alternatives
G. Passemard - STMicroelectronics
J. Durand - Université de Montpellier, Institut Européen des Membranes - IEM
Publication Details: Microelectronic Engineering, Vol.82, pp.333-340
Identifiers: 9947003409311
Academic Unit: Institut Européen des Membranes - IEM
Language: English
Resource Type: Journal article
Local Fields: hal-00080019