Porous silicon layers used for gas sensor applications

Journal article

Peer reviewed

A. Foucaran, P. Pascal-Delannoy, Alain Giani, A. Sackda, P. Combette and A. Boyer

Thin Solid Films, Vol.297(1-2), pp.317 - 320

04/1997

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Title: Porous silicon layers used for gas sensor applications
Creators - without role: A. Foucaran - Université de Montpellier
P. Pascal-Delannoy - Centre d'Electronique et de Micro-optoélectronique de Montpellier
Alain Giani - Université de Montpellier
A. Sackda - Université de Montpellier
P. Combette - Université de Montpellier
A. Boyer - Université de Montpellier
Publication Details: Thin Solid Films, Vol.297(1-2), pp.317 - 320
Identifiers: 9946399809311
Academic Unit: Université de Montpellier
Language: English
Resource Type: Journal article
Local Fields: hal-01788545