Résumé
E cient and dexterous manipulation of very small (micrometer and millimeter sized) objects require the use of high precision micromanipulation systems. The accuracy of the positioning is nevertheless limited by the noise due to vibrations of the end e ectors making it di cult to achieve precise micrometer and nanometer displacements to grip small objects. The purpose of this paper is to analyze the sources of noise and to take it into account in dynamic models of micromanipulation systems. Environmental noise is studied considering the following sources of noise: ground motion and acoustic noises. Each source of noise is characterized in di erent environmental conditions and a separate description of their e ects is investigated on micromanipulation systems using millimeter sized cantilevers as end e ectors. Then, using the nite di erence method (FDM), a dynamic model taking into account studied noises is used. Ground motion is described as a disturbance transmitted by the clamping to the tip of the cantilever and acoustic noises as external uniform and orthogonal waves. For model validation, an experimental setup including cantilevers of di erent lengths is designed and a high resolution laser interferometer is used for vibration measurements. Results show that the model allows a physical interpretation about the sources of noise and vibrations in millimeter sized micromanipulation systems leading to new perspectives for high positioning accuracy in robotics micromanipulation through active noise control.