New Silicon Architectures by Gold-Assisted Chemical Etching

Journal article

Peer reviewed

Mikhael Bechelany, Berodier Elise, Maeder Xavier, Schmitt Sebastian, Michler Johann and Philippe Laetitia

ACS Applied Materials & Interfaces, Vol.3(10), pp.3866 - 3873

26/10/2011

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Title: New Silicon Architectures by Gold-Assisted Chemical Etching
Creators - without role: Mikhael Bechelany - Université de Montpellier, Institut Européen des Membranes - IEM
Berodier Elise
Maeder Xavier
Schmitt Sebastian
Michler Johann
Philippe Laetitia - Swiss Federal Laboratories for Materials Science and Technology
Publication Details: ACS Applied Materials & Interfaces, Vol.3(10), pp.3866 - 3873
Identifiers: 9945898909311
Academic Unit: Institut Européen des Membranes - IEM
Language: English
Resource Type: Journal article
Local Fields: hal-01696090