Micromachined high sensitivity thermal inclinometer

Journal article

Peer reviewed

Sensor Review, Vol.26(3), pp.203-208

2006

Abstract

Measurement

Silicon

Thermal measurement

This document presents the study of a one-dimensional thermal inclinometer based on free convection

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Title: Micromachined high sensitivity thermal inclinometer
Creators - without role: J. Courteaud - Centre d'Electronique et de Micro-optoélectronique de Montpellier
P. Combette - Université de Montpellier
Alain Giani - Université de Montpellier
Publication Details: Sensor Review, Vol.26(3), pp.203-208
Identifiers: 9946053809311
Academic Unit: Université de Montpellier
Language: English
Resource Type: Journal article
Local Fields: hal-00329583