Résumé
This paper reports on carbon nanotubes (CNT) arrays grown on patterned catalysts by plasma-enhanced chemical vapor deposition (PECVD). CNT growth has been performed by low pressure high-density plasma process at 700 C in acetylene/ammonia mixture. Prior to CNT growth, a standard lift-off process has been used for catalyst patterning. The chemical impact of the lift-off sequence on the catalyst activity is discussed with respect to the amount of Ni pre-deposited. In particular, it discusses the impact of this wet treatment on CNT growth when the catalyst amount is lower than a threshold value.