Investigation structural heterogeneities in hydrogenated nanocrystalline silicon thin films from argon-diluted silane dusty plasma PECVD

Journal article

Peer reviewed

Rachid Amrani, Fouaz Lekoui, Frederic Pichot, Kamal Annou, Pascale Abboud, Elyes Garoudja, Walid Filali, Slimane Oussalah and Yvan Cuminal

Vacuum, Vol.229

11/2024

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Title: Investigation structural heterogeneities in hydrogenated nanocrystalline silicon thin films from argon-diluted silane dusty plasma PECVD
Creators - without role: Rachid Amrani
Fouaz Lekoui
Frederic Pichot
Kamal Annou
Pascale Abboud
Elyes Garoudja
Walid Filali
Slimane Oussalah
Yvan Cuminal - Université de Montpellier, Institut d'Electronique et des Systèmes - IES
Publication Details: Vacuum, Vol.229
Identifiers: 9943508509311
Academic Unit: Institut d'Electronique et des Systèmes - IES
Language: English
Resource Type: Journal article
Local Fields: hal-04797677