Investigation of Pt/Ti bilayer on SiNx/Si substrates for thermal sensor applications

Journal article

Peer reviewed

Alain Giani, Frédérick Mailly, Frédérique Pascal-Delannoy, Alain Foucaran and André Boyer

Journal of Vacuum Science & Technology A, Vol.20(1), pp.112-116

2002

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Title: Investigation of Pt/Ti bilayer on SiNx/Si substrates for thermal sensor applications
Creators - without role: Alain Giani - Centre National de la Recherche Scientifique
Frédérick Mailly - Université de Montpellier
Frédérique Pascal-Delannoy - Centre National de la Recherche Scientifique
Alain Foucaran - Université de Montpellier
André Boyer - Centre National de la Recherche Scientifique
Publication Details: Journal of Vacuum Science & Technology A, Vol.20(1), pp.112-116
Identifiers: 9942835009311
Academic Unit: Laboratoire d'Informatique de Robotique et de Microélectronique de Mtp - LIRMM
Language: English
Resource Type: Journal article
Local Fields: hal-00324019