- Title
- Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering
- Creators - without role
- A. Boulouz - Centre National de la Recherche ScientifiqueAlain Giani - Université de MontpellierM. Boulouz - Centre National de la Recherche ScientifiqueA. Boyer - Centre National de la Recherche Scientifique
- Publication Details
- Thin Solid Films, Vol.323(1-2), pp.85-92
- Identifiers
- 9945779909311
- Academic Unit
- Université de Montpellier
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-02048544
Journal article
Influence of substrate temperature and target composition on the properties of yttria-stabilized zirconia thin films grown by r.f. reactive magnetron sputtering
Thin Solid Films, Vol.323(1-2), pp.85-92
06/1998
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