Résumé
In this work, the directed selfassembly of Si-contg. triblock terpolymer chains ordered into nanoscale ring arrays has been reported. To produce long-range ordered ring patterns, a solvent vapor annealing (SVA) methodol. was used to promote the mobility of the poly(1,1-dimethylsilacyclobutane)block-polystyrene-block-poly(Me methacrylate) (PDMSB-b-PS-b-PMMA or DSM) chains deposited on topog. patterned silica substrates. By using this strategy, highly ordered core/shell cylinders with a domain orientation change induced by the film thickness were demonstrated. An effective control of the domain orientation was achieved by using a blending methodol., which revealed an efficient route to fabricate templated DSM thin films with core/shell cylinders having a highly desired out-of-plane orientation both on mesas and in trenches.