Résumé
Thanks to their unique optical properties Ge–Sb–S–Se–Te amorphous chalcogenide materials andcompounds ofer tremendous opportunities of applications, in particular in near and mid-infraredrange. This spectral range is for instance of high interest for photonics or optical sensors. Usingco-sputtering technique of chalcogenide compound targets in a 200 mm industrial deposition tool,we show how by modifying the amorphous structure of GeSb$_w$S$_x$Se$_y$Te$_z$ chalcogenide thin flmsone can signifcantly tailor their linear and nonlinear optical properties. Modelling of spectroscopicellipsometry data collected on the as-deposited chalcogenide thin flms is used to evaluate their linearand nonlinear properties. Moreover, Raman and Fourier-transform infrared spectroscopies permittedto get a description of their amorphous structure. For the purpose of applications, their thermalstability upon annealing is also evaluated. We demonstrate that depending on the GeSb$_w$S$_x$Se$_y$Te$_z$flm composition a trade-of between a high transparency in near- or mid-infrared ranges, strongnonlinearity and good thermal stability can be found in order to use such materials for applicationscompatible with the standard CMOS integration processes of microelectronics and photonics.