Full Si wafer conversion into bulk 3C-SiC

Journal article

Peer reviewed

A. Leycuras, O. Totterau, P. Vicente, L. Falkowsky, Pascal Girard and J. Camassel

Materials Science Forum, Vol.389-393, pp.147-150

2002

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Title: Full Si wafer conversion into bulk 3C-SiC
Creators - without role: A. Leycuras - Centre de Recherche sur l'Hétéro-Epitaxie et ses Applications
O. Totterau
P. Vicente - Université de Montpellier
L. Falkowsky
Pascal Girard - Institut National des Sciences Appliquées de Lyon
J. Camassel - Université de Montpellier
Publication Details: Materials Science Forum, Vol.389-393, pp.147-150
Identifiers: 9937016209311
Academic Unit: Université de Montpellier
Language: English
Resource Type: Journal article
Local Fields: hal-00324027