Formation of bubbles and extended defects in He implanted (1 0 0) Si at elevated temperatures

Douglas L. da Silva; Marcio J. Mörschbächer; Paulo F.P. Fichtner; Erwan Oliviero; Moni Behar

doi:10.1016/j.nimb.2004.01.148

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Formation of bubbles and extended defects in He implanted (1 0 0) Si at elevated temperatures

Article de revue scientifique

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Formation of bubbles and extended defects in He implanted (1 0 0) Si at elevated temperatures

Douglas L. da Silva, Marcio J. Mörschbächer, Paulo F.P. Fichtner, Erwan Oliviero et Moni Behar

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, Vol.219(1-4), p.713-717

01/06/2004

DOI: https://doi.org/10.1016/j.nimb.2004.01.148

Résumé

Bubble nucleation

Extended defects

He retention

Silicon

The formation and thermal evolution of He bubbles and extended defects in Si are studied as a function of the implantation ( T i) and annealing ( T a) temperatures. (1 0 0) Si wafers were implanted with 40 keV He + ions to a fluence of 1 × 10 16 cm −2 at temperatures T i from 300 to 623 K. After the implantations the samples were submitted to thermal treatments for 600 s at temperatures T a from 673 to 1073 K. The samples were analyzed using transmission electron microscopy (TEM), Rutherford backscattering/channeling (RBS/C) and elastic recoil detection (ERD) techniques. The results obtained show that the microstructure characteristics of the bubble and the extended defect systems, as well as their thermal evolution behavior, depend significantly on the implantation temperature. A correlation between the dynamic annealing behavior and the bubble and defect formation process is proposed.

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Détails

Titre: Formation of bubbles and extended defects in He implanted (1 0 0) Si at elevated temperatures
Créateurs - sans rôle: Douglas L. da Silva - Instituto de Fı́sica, Universidade Federal do Rio Grande do Sul, 91501-970 Porto Alegre, RS, Brazil
Marcio J. Mörschbächer - Instituto de Fı́sica, Universidade Federal do Rio Grande do Sul, 91501-970 Porto Alegre, RS, Brazil
Paulo F.P. Fichtner - Universidade Federal do Rio Grande do Sul
Erwan Oliviero - Instituto de Fı́sica, Universidade Federal do Rio Grande do Sul, 91501-970 Porto Alegre, RS, Brazil
Moni Behar - Instituto de Fı́sica, Universidade Federal do Rio Grande do Sul, 91501-970 Porto Alegre, RS, Brazil
Détails de publication: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, Vol.219(1-4), p.713-717
Éditeur: Elsevier B.V
Nombre de pages: 5
Identifiants: 99234087009311
Unité académique: ICGM - Institut Charles Gerhardt Montpellier
Langue: Anglais
Type de ressource: Article de revue scientifique