Abstract
In this work, the ellipsometric measurements of small molecular size polypeptides deposited onto silicon are analyzed. Results of ellipsometric evaluation procedures based on transparent layer, absorbing layer and discontinuous layer approaches are compared. Although these models result in similar fitting quality and can predict the amount of the deposited material, the gained optical properties can be rather differ- ent due to the different assumptions of the models. To choose the physically correct results, independent measurements as atomic force microscopy or transmission measurement of peptide solutions are nec- essary. It is shown that the measured ellipsometric depolarization can provide also useful information about the sample properties.