Electrical contrast observations and voltage measurements by Kelvin probe force gradient microscopy

Journal article

Peer reviewed

Pascal Girard, M. Ramonda and D. Saluel

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, Vol.20(4), pp.1348-1355

2002

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Title: Electrical contrast observations and voltage measurements by Kelvin probe force gradient microscopy
Creators - without role: Pascal Girard - Université de Montpellier
M. Ramonda - Université de Montpellier
D. Saluel - CEA Grenoble
Publication Details: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures, Vol.20(4), pp.1348-1355
Identifiers: 9941355309311
Academic Unit: Université de Montpellier
Language: English
Resource Type: Journal article
Local Fields: hal-00327064