- Title
- Effect of target to substrate distance on the properties of RF magnetron sputtered ZnO thin films
- Creators - without role
- R.Ondo NdongH. Martial OmandaP. SouloungangaAlain Giani - Université de Montpellier, Institut d'Electronique et des Systèmes - IESB. Sorli - Université de Montpellier, Institut d'Electronique et des Systèmes - IESAlain Foucaran - Université de Montpellier, Institut d'Electronique et des Systèmes - IES
- Publication Details
- International Journal of research and Reviews in Applied Sciences, Vol.Vol 17(Issue 1), pp.pp. 122-126
- Identifiers
- 9945102109311
- Academic Unit
- Institut d'Electronique et des Systèmes - IES
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-02052556
Journal article
Effect of target to substrate distance on the properties of RF magnetron sputtered ZnO thin films
International Journal of research and Reviews in Applied Sciences, Vol.Vol 17(Issue 1), pp.pp. 122-126
2013
Metrics
1 Record Views