- Title
- Design of fast sensor for mass flow controller using thin film technology based on an analytical thermal model
- Creators - without role
- P. RudentP. Navrátil - Czech Academy of Sciences, Institute of Photonics and ElectronicsAlain Giani - Université de MontpellierA. Boyer - Centre National de la Recherche Scientifique
- Publication Details
- Journal of Vacuum Science & Technology A, Vol.16(6), pp.3559-3569
- Identifiers
- 9945671309311
- Academic Unit
- Université de Montpellier
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-02048630
Journal article
Design of fast sensor for mass flow controller using thin film technology based on an analytical thermal model
Journal of Vacuum Science & Technology A, Vol.16(6), pp.3559-3569
1998
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