- Title
- Deep reactive etching ion etching of thermally co-evaporated Te-Ge films for IR integrated optics components
- Creators - without role
- Caroline Vigreux - Université de Montpellier, Institut Charles Gerhardt Montpellier - ICGMSéverine de Sousa - Université de Montpellier, Institut Charles Gerhardt Montpellier - ICGMVéronique Foucan - Université de Montpellier, Institut Charles Gerhardt Montpellier - ICGMEléonore Barthélémy - Université de Montpellier, Institut Charles Gerhardt Montpellier - ICGMAnnie Pradel - Université de Montpellier, Institut Charles Gerhardt Montpellier - ICGM
- Publication Details
- Microelectronic Engineering, Vol.88
- Identifiers
- 9936483209311
- Academic Unit
- Institut Charles Gerhardt Montpellier - ICGM
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-00524673
Journal article
Deep reactive etching ion etching of thermally co-evaporated Te-Ge films for IR integrated optics components
Microelectronic Engineering, Vol.88
2011
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