Control of pore structure and characterization of plasma-polymerized SiOCH films deposited from octamethylcyclotetrasiloxane (OMCTS)

Journal article

Peer reviewed

Chia-Hao Lo, Meng-Hsuan Lin, Kuo-Sung Liao, Manuel de Guzman, Hui-An Tsai, Ta-Chin Wei, V. Rouessac, Kueir-Rarn Lee and Juin-Yih Lai

Journal of Membrane Science, Vol.365(1-2), pp.418 - 425

12/2010

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Title: Control of pore structure and characterization of plasma-polymerized SiOCH films deposited from octamethylcyclotetrasiloxane (OMCTS)
Creators - without role: Chia-Hao Lo - Université de Montpellier, Institut Européen des Membranes - IEM
Meng-Hsuan Lin
Kuo-Sung Liao
Manuel de Guzman - Chung Yuan Christian University
Hui-An Tsai
Ta-Chin Wei
V. Rouessac - Université de Montpellier, Institut Européen des Membranes - IEM
Kueir-Rarn Lee
Juin-Yih Lai
Publication Details: Journal of Membrane Science, Vol.365(1-2), pp.418 - 425
Identifiers: 9945905809311
Academic Unit: Institut Européen des Membranes - IEM
Language: English
Resource Type: Journal article
Local Fields: hal-01696854