- Title
- Contribution of oxide traps on defect creation and LVSILC conduction on ultra thin gate oxide devices
- Creators - without role
- D. Zander - Laboratoire des Technologies de la MicroélectroniqueFrédéric Saigné - Centre d'Electronique et de Micro-optoélectronique de MontpellierA. MeinertzhagenC. Petit
- Publication Details
- Microelectronics Reliability, Vol.258, pp.135-140
- Identifiers
- 9947065309311
- Academic Unit
- Université de Montpellier
- Language
- English
- Resource Type
- Journal article
- Local Fields
- hal-00327175
Journal article
Contribution of oxide traps on defect creation and LVSILC conduction on ultra thin gate oxide devices
Microelectronics Reliability, Vol.258, pp.135-140
2003
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