Abstract
We present the first investigation of 2 inch diameter 0.5 mm thick 4H-SiC layers grown by the CF-PVT (Continuous Feed-Physical Vapor Transport) method. From Synchrotron White Beam X-Ray Topography we show that no new defect is generated in the CF-PVT material with respect to the 4H-SiC seed. We also show that a large strain takes place at the layer to seed interface which probably comes from the difference in doping level and thus in lattice parameter between the layer and the seed. From Raman experiments we demonstrate a high structural uniformity and low residual doping level. This is a surprising result which comes despite the lack of sophisticated purification procedure. To get confirmation, we have performed SIMS and LTPL investigations.