Résumé
In this paper we present a new methodology for efficient electromechanical characterization of a CMOS-compatible micro-electro mechanical sensors (MEMS) technology. Using an original test structure, the so-called `U-shape cantilever beam', we are able to determine all mechanical characteristics of force sensors constituted with elementary beams in a given technology. A complete set of electromechanical relations that can be used for the design of Microsystems have been also developed.