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Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate
Journal article   Peer reviewed

Automated on-Wafer Extraction of Equivalent-Circuit Parameters in thin-Film Bulk Acoustic Wave Resonators and Substrate

Humberto Campanella, Pascal Nouet, Arantxa Uranga, Pedro de Paco, Nuria Barniol and Jaume Esteve
Microwave and Optical Technology Letters, Vol.50(1), pp.4-7
2008
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