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Atomic layer deposition of transition metal films and nanostructures for electronic and catalytic applications
Journal article   Open access   Peer reviewed

Atomic layer deposition of transition metal films and nanostructures for electronic and catalytic applications

James Maina, Andrea Merenda, Matthieu Weber, Jennifer Pringle, Mikhael Bechelany, Lachlan Hyde and Ludovic Dumée
Critical Reviews in Solid State and Materials Sciences, Vol.46(5), pp.468-489
03/09/2021
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