Atomic force microscopy investigation of a -C:H films prepared by plasma enhanced chemical vapor deposition for inertial confinement fusion experiments

Journal article

Peer reviewed

B. Dumay, E. Finot, M. Theobald, O. Legaie, P. Baclet, J. Durand and J. Goudonnet

Journal of Vacuum Science & Technology A, Vol.20(2), pp.366 - 374

03/2002

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Title: Atomic force microscopy investigation of a -C:H films prepared by plasma enhanced chemical vapor deposition for inertial confinement fusion experiments
Creators - without role: B. Dumay - CEA Valduc
E. Finot - Centre National de la Recherche Scientifique
M. Theobald - CEA Valduc
O. Legaie - Commissariat à l'Énergie Atomique et aux Énergies Alternatives
P. Baclet - Commissariat à l'Énergie Atomique et aux Énergies Alternatives
J. Durand - Université de Montpellier, Institut Européen des Membranes - IEM
J. Goudonnet - Université de Bourgogne
Publication Details: Journal of Vacuum Science & Technology A, Vol.20(2), pp.366 - 374
Identifiers: 9936264909311
Academic Unit: Institut Européen des Membranes - IEM
Language: English
Resource Type: Journal article
Local Fields: hal-01726643