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Atomic-Scale Structure and Its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica
Article de revue   Avec comité de lecture

Atomic-Scale Structure and Its Impact on Chemical Properties of Aluminum Oxide Layers Prepared by Atomic Layer Deposition on Silica

Monu Kaushik, Cesar Leroy, Zixuan Chen, David Gajan, Elena Willinger, Christoph R. Muller, Franck Fayon, Dominique Massiot, Alexey Fedorov, Christophe Coperet, …
Chemistry of materials, Vol.33(9), pp.3335-3348
11/05/2021

Résumé

Chemistry Chemistry, Physical Materials Science Materials Science, Multidisciplinary Physical Sciences Science & Technology Technology

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1 Consultations de la notice

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