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Analytic Optimization of Cantilevers for Photoacoustic Gas Sensor with Capacitive Transduction
Journal article   Open access   Peer reviewed

Analytic Optimization of Cantilevers for Photoacoustic Gas Sensor with Capacitive Transduction

Wioletta Trzpil, Nicolas Maurin, Roman Rousseau, Diba Ayache, Aurore Vicet and Michaël Bahriz
Sensors, Vol.21(4)
2021

Abstract

MEMS gas sensor photoacoustics cantilever capacitive detection analytic model
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https://doi.org/10.3390/s21041489View
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