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A dual axis CMOS micromachined convective thermal accelerometer
Journal article   Peer reviewed

A dual axis CMOS micromachined convective thermal accelerometer

Alexandra Garraud, Alain Giani, Philippe Combette, Benoit Charlot and Mathieu Richard
Sensors and Actuators A: Physical , Vol.170(1-2), pp.44 - 50
11/2011
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