Abstract
The thesis objective is the conception of a new technology of biosensors based on carbon nanotubes. This conception aims to the integration of these nanostructures as transducers in a chemical gate and as a base for a field effect transistor architecture. The chemical gate and transistor architecture will be designed with the goal of field effect transduction. The target chosen for this technology is the kinase enzyme family. More specifically, the thesis aims to the design and realization of a proof of concept for a specific target: the complex CDK4/cyclinD.The research is threefold. First, the work consists in the design of the new architecture based on literature. Then the second objective is to design a clean room process for manufacturing of the architecture. Finally, the goal of the thesis is to realize manufacturing of the sensor to the proof of concept.This new technology is based on an existing chemical sensor that demonstrated selectivity and sensitivity. The current design aims to reduce human interaction and the use of heavy equipment during measurements. The second design constraint is the passivity of the sensor toward the biological field containing its target. This would allow monitoring of the target and integration in a multisensor architecture.The clean room process aims to be robust and reproducible for future integration of the sensor in an acquisition chain able to generate large quantities of normalized data. The second goal of the process design is to allow the production of large series of sensors at low unitary cost.This thesis manuscript presents the research work leading to the design of the new architecture followed by the design of the manufacturing process. Then the realization results are presented with the trials leading to the characterization of CNTFETs readily modified for selective biosensing.