Résumé
An electrical modelisation of eight lossy Cu interconnects is proposed thanks to the implementation of a vector finite element method. This full wave analysis gives frequency dependence of proper or mutual inductance, capacitance or resistance from resulting transmission line equations system. Spice results are then proposed for different set of spacing and low dielectric material in case of interconnects whose area is less than 1 m2 embedded in SiO2 interlevel or other low dielectric material