Résumé
We report a novel method to create 2D hierarchical nanopatterns with a simple PDMS scaffold made of a replica of a grating and a spacer. This technique takes advantage of the Talbot effect that is the creation of an interference pattern from a grating at a given distance normal to the grating surface. By combining a conformal soft mask made of PDMS and a spacer to separate the phase shift mask from the photoresist, we can take advantage of the interference pattern to imprint smaller structures.