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TRING-module : a high-range and high-precision 2DoF microsystem dedicated to a modular micromanipulation station
Acte de colloque

TRING-module : a high-range and high-precision 2DoF microsystem dedicated to a modular micromanipulation station

Micky Rakotondrabe, Yassine Haddab et Philippe Lutz
Proceedings of the 5th International Workshop on MicroFactories, IWMF'06, Vol.sur CD ROM
Proceedings of the 5th International Workshop on MicroFactories, IWMF'06
2006

Résumé

Engineering Sciences Micro and nanotechnologies Microelectronics
As part of a microfactory concept, a micromanipulation station is made up of two independant microsystems having each one two degrees of freedom (rotation and linear motions). That allows the station to manipulate microparts with a high range of dimensions, from 10 microns to some millimeters (2 mm). This paper presents one of these microsystems called TRING-module.

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